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Confocal Chromatic Sensor
- Surface profile and roughness measurement
- Substrate thickness measurement (dual sensor required)
- Resolution: 1nm
- Angular acceptance: up to 45°
- ø=15mm, L=80mm
 
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Low Coherence Infrared Interferometer
- Depth and thickness measurement (non metal materials)
- Etching control (wet and dry)
- Thicknesses of individual wafer in a batch
- Resolution: 0.1µm
- Individual layer thickness measurement (multi layer substrate)
- ø=17mm, L=100mm
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White Light 3D Optical Sensor
- Surface inspection and 3D measurement
- Optical magnification: from X2 to X50
- Footprint: 100x200x300mm (w,l,h)
- Zsub nanometer resolution
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